The SEM/FIB Workbench:

Our Nanorobotics extend Electron or Ion Microscopes from analytical instruments to material processing systems. This page is the entry to a group of complete systems.

All applications base on our absolute positioning high performance Nanorobotics manipulators. Once installed in a SEM or FIB they can be expanded by several different modules to form application oriented turnkey solutions. This modular design allows the usage of one basic investment for several different applications.

Plenty of further descriptions are available on request, please contact us.

• Manipulators
  Comparison of principles, examples, properties
• The Dimensonal SEM/FIB
  The first in-situ long range 3D Metrology with single nm resolution available in the market
• Wafer Probing Systems
  From manual versions to automation
• Sample stages
  XY, XYZ, XYZ-Tilt, XYZ-Rotation-Tilt
• SEM based Lithography
  XY-positioning and stitching improvements by Nanorobotics sub-stage
• Accessory
  Probe tips, Nanofinger, Gripper, Vision systems, ...



• Turnkey system solutions
  by selecting a fitting SEM/FIB


Applications:

• Single Device Characterization by Nano-Probing in a SEM
  Application paper from TSMC describing the power of Probing Systems from Klocke Nanotechnik for Wafer Probing
• Preparation of TEM-samples
  Handling of TEM lamellas in FIB chambers
• Processing material in Electron Microscopes
  Working material in several dimensions in an electron microscope becomes possible
• Measurement of Field-emission by Nanomanipulation in a SEM
  Precise and drift-free positioning enables reliable Field-emission
• XRay Imaging
  X-ray images with resolution better than 120 nm
• Manipulation of Carbon Nanotubes
  inside of a Field-Emission SEM
• Force Feedback
  Combination of manipulator, force sensor and joystick