The application defines the instrumentation!

Do you agree?

• Handling of smallest objects
• Nanomanipulation and gripping
• High throughput TEM lamella preparation
• In-SEM/FIB NanoFabrication



• Quantitative traceable 3-dimensional in-SEM/FIB surface analysis
• Material Research
• Forensic Research
• Tribology



• AFM-STM in-SEM applications
• Mask Repair
• Wafer Probing



• Similar tasks?

Then it may be helpful to collect all information available about how to solve the planned application in the most convenient way. This leads to the right handling, manipulation and measurement tools - and to a fitting SEM, FIB or Dual beam chamber. Klocke Nanotechnik can help you during this important decision phase, e.g. with a SEM selection guide, available on request.

Or you can order one of the SEM turnkey solutions described on the right.

• The TESCAN SEM FIB systems in XM chambers
  ... as installed in our SEM Demo Lab



• The Raith e_LiNE nano engineering workstation
  ... equipped with up to 4 Nanorobotics manipulators and different Lithography stages